JPS6327470U - - Google Patents
Info
- Publication number
- JPS6327470U JPS6327470U JP12057986U JP12057986U JPS6327470U JP S6327470 U JPS6327470 U JP S6327470U JP 12057986 U JP12057986 U JP 12057986U JP 12057986 U JP12057986 U JP 12057986U JP S6327470 U JPS6327470 U JP S6327470U
- Authority
- JP
- Japan
- Prior art keywords
- cvd apparatus
- plasma cvd
- diameter
- plasma
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 6
- 239000012495 reaction gas Substances 0.000 claims 3
- 230000007423 decrease Effects 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 1
- 150000003377 silicon compounds Chemical class 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12057986U JPH0441178Y2 (en]) | 1986-08-06 | 1986-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12057986U JPH0441178Y2 (en]) | 1986-08-06 | 1986-08-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6327470U true JPS6327470U (en]) | 1988-02-23 |
| JPH0441178Y2 JPH0441178Y2 (en]) | 1992-09-28 |
Family
ID=31009024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12057986U Expired JPH0441178Y2 (en]) | 1986-08-06 | 1986-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441178Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04129314A (ja) * | 1990-09-20 | 1992-04-30 | Murata Mfg Co Ltd | ディスクリミネータ |
-
1986
- 1986-08-06 JP JP12057986U patent/JPH0441178Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04129314A (ja) * | 1990-09-20 | 1992-04-30 | Murata Mfg Co Ltd | ディスクリミネータ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441178Y2 (en]) | 1992-09-28 |